Details
Presenter(s)
Display Name
Josep Maria Sánchez-Chiva
- Affiliation
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AffiliationUniversitat Politècnica de Catalunya
- Country
Abstract
In this article, a test setup for the characterization of Lorentz force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and current driving of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.