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Video s3
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    Presenter(s)
    Verreault Antoine Headshot
    Display Name
    Verreault Antoine
    Affiliation
    Affiliation
    Université du Québec à Chicoutimi
    Country
    Author(s)
    Display Name
    Verreault Antoine
    Affiliation
    Affiliation
    Université du Québec à Chicoutimi
    Display Name
    Paul-Vahe Cicek
    Affiliation
    Affiliation
    Université du Québec à Montréal
    Affiliation
    Affiliation
    Université du Québec à Chicoutimi
    Abstract

    This paper presents the design and simulation of a levitating MEMS speaker. The device is composed of a levitating membrane actuated through electrostatic forces using several electrodes and a control system. The absence of supporting anchors allows for a drastic reduction of damping losses and therefore promises higher power efficiency. Simulation results indicate very promising performance.

    Slides
    • A Surface-Micromachined Levitating MEMS Speaker (application/pdf)