This work presents the design and fabrication of a chevron (V-shaped) type electro-thermally actuated micro-electro-mechanical systems (MEMS) actuator aimed for a DC switch structure using the PiezoMUMPs technology. The chevron actuator employs stacked composite silicon/oxide/Al–Cr layers. Using oxide layer acts as an interface between the thin film aluminum (Al) heater and silicon (Si) structural layer forms the MEMS switch for power switching applications.