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    Details
    Author(s)
    Display Name
    Mohit Kumar Gupta
    Affiliation
    Affiliation
    imec
    Display Name
    Pieter Weckx
    Affiliation
    Affiliation
    imec
    Affiliation
    Affiliation
    imec
    Display Name
    Julien Ryckaert
    Affiliation
    Affiliation
    imec
    Abstract

    This paper presents an extensive study of 6T-SRAM based on FinFET for advanced technology nodes beyond 5nm. We deduce that parasitic resistance becomes the main bottleneck for SRAM design at these nodes. SRAM's writing margin and read speed are impacted due to the increased Bit-Line (BL) and Word-Line (WL) resistance. This work primarily explores possible solutions to improve the parasitic resistance at advanced process technology nodes. These solutions are 1) strapping of BL and WL to higher metal, and 2) adopting the resistance optimized BEOL. Strapping BL and WL to higher metal layer improves the Write Trip Point (WTP) by ~100mV and the critical path delay by 24% at the cost of 50% higher energy. Resistance optimized BEOL can improve WTP by ~50mV more and delay by 25% more, at the cost of 8% increased energy consumption