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Video s3
    Details
    Presenter(s)
    Elisabetta Moisello Headshot
    Affiliation
    Affiliation
    University of Pavia
    Country
    Country
    Italy
    Author(s)
    Affiliation
    Affiliation
    University of Pavia
    Display Name
    Michele Vaiana
    Affiliation
    Affiliation
    STMicroelectronics
    Affiliation
    Affiliation
    STMicroelectronics
    Affiliation
    Affiliation
    STMicroelectronics
    Display Name
    Giuseppe Bruno
    Affiliation
    Affiliation
    STMicroelectronics
    Display Name
    Edoardo Bonizzoni
    Affiliation
    Affiliation
    Università degli Studi di Pavia
    Display Name
    Piero Malcovati
    Affiliation
    Affiliation
    Università degli Studi di Pavia
    Abstract

    This paper presents a novel micromachined high-responsivity thermopile sensor, fully compatible with standard CMOS-SOI (Silicon-On-Insulator) processes. The proposed thermopile features a versatile mosaic structure, based on 128 60 um x 60 um pixels connected in series and/or in parallel. Two versions of the proposed thermopile sensor, featuring a different number of equivalent pixels, are presented and fully characterized. The most performing of the two features 2.9x10^4 V/W-responsivity, outperforming other state-of-the-art thermopile sensors. The application of the most performing thermopile as proximity and motion detector was also verified through measurements.

    Slides
    • A Novel CMOS-SOI High-Responsivity Thermopile for Thermal Sensing Applications (application/pdf)