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    Author(s)
    Display Name
    Zdenek Kolka
    Affiliation
    Affiliation
    Brno University of Technology
    Display Name
    Viera Biolkova
    Affiliation
    Affiliation
    Brno University of Technology
    Display Name
    Dalibor Biolek
    Affiliation
    Affiliation
    Brno University of Technology / University of Defence
    Display Name
    Zdenek Biolek
    Affiliation
    Affiliation
    Brno University of Technology
    Abstract

    The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.