Details
Presenter(s)
Display Name
Akiyoshi Tanaka
- Affiliation
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AffiliationNagoya University
- Country
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CountryJapan
Abstract
This paper shows a 3D (3x3x2) frequency-shift label-free biosensor array using vertically-stacked LC oscillators in 22 nm CMOS technology. The bio-sensing circuit is composed of the two 60-GHz LC oscillators and dividers that are necessary for extracting 60 GHz output signals from the chip. The 0.04 mm^2 chip (0.0035 mm^2 per single-element) measurement using thick and thin resin samples successfully demonstrated their vertical and horizontal detection in 60 μm x 60 μm x 4 μm special resolution and 73 % fill factor consuming 4.8 mW under 1.2 V per the single-element.